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OALib Journal期刊
ISSN: 2333-9721
费用：99美元
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大功率CO_2激光沉积超硬Si_3N_4膜的性能和组织
, PP. 67-71
Keywords: 激光化学气相沉积,Si_3N_4膜,组织结构,硬度,耐磨,抗蚀
Abstract:
用大功率(kW级)CO_2激光在金属基材上通过化学气相沉积获得α-Si_3N_4膜。膜层多为细小的Si_3N_4颗粒组成,与基材有良好的结合,具有超硬和优良的耐磨抗蚀等性能,厚度在5—30μm范围内可控。
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