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OALib Journal期刊
ISSN: 2333-9721
费用：99美元
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重掺Sb的Si单晶生长过程中熔体内Sb浓度变化规律
, PP. 188-194
Abstract:
本文建立了描述重掺Sb的si单晶生长过程中熔体内Sb浓度变化规律的数学模型。用该模型计算的理论曲线与实验曲线一致。结果表明,减压拉晶能有效地控制拉晶过程中由于溶质分凝造成的熔体内Sb浓度的增加,从而能大大地推迟“析出”。当炉膛压力大约减至2.7kPa时,能保持熔体中Sb浓度几乎不变。
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