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OALib Journal期刊
ISSN: 2333-9721
费用：99美元
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离子束辅助沉积Fe-N薄膜的相形成
, PP. 273-276
Keywords: 氮化铁,离子束辅助沉积,磁性薄膜
Abstract:
用离子束辅助沉积方法合成Ｆｅ－Ｎ薄膜，用离子束背散射和Ｘ射线衍射方法分析薄膜成分和结构．结果表明，薄膜的组分（α－Ｆｅ，ζ－Ｆｅ２Ｎ，ε－Ｆｅ（２－３）Ｎ，γ＇－Ｆｅ４Ｎ相等）取决于沉积参数。给出了沉积温度和Ｎ／Ｆｅ原子到达比组成的相区域图．
| [1] | 1YasuhiroNagal,AkioTago,KeiichiYanagisawa,TomoyukiToshima．JApplPhys,1987;61:38412KensukeNakajima,ShoichiOkamoto．ApplPhysLett,1990,56:923WangS,KryderNH,JApplPhys,1991;67:51344ShigekiNskagawa,TakehikoHamaguchi,MasahikoNaoe．IEEETransMagn,1992;28:29465KanoA,KazamaNS,FujimoriH,JApplPhys,1982;53:83326MatahiroKomuro,YuzooKozono,MasanobuHanazono,YutakaSugita．JApplPhys,1990;67:51267江海,陶琨,李恒德．金属学报,1993:29:B1738RauschenbachB,KolitschA,HohmuthK,PhysStatSol,1983;A80:471*
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