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OALib Journal期刊
ISSN: 2333-9721
费用：99美元
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射频磁控溅射沉积氮化碳薄膜的结构和成键性质
, PP. 439-442
Keywords: 氮化碳薄膜,射频磁控溅射,沉积,结构
Abstract:
利用反应性质频磁控溅射在Ｓｉ（１００）单晶衬底上沉积氮化碳薄膜,并系统地了薄膜的结构,成分及化学键等信息.Ｘ射线衍射分析表明,制备的氮化碳薄膜具有非晶结构.红外吸收谱说明薄膜中碳,氮原子结构成化学键.
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