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OALib Journal期刊
ISSN: 2333-9721
费用：99美元
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电弧离子镀(Ti,Al)N复合薄膜的结构和性能研究
, PP. 55-60
Keywords: 电弧离子镀,(Ti,Al)N薄膜,结构变化
Abstract:
利用电弧离子镀设务在1Cr11Ni2W2MoV不锈钢基体表面沉积了不同成分的(Ti1-xAlx)薄膜；X射线衍射分析表明，x在0-0.5之间时，薄膜是B1型(NaCl)单相结构;x=0.64时,同时出了B1和B4型(ZnS)两种相结构,x≥0.79时,只出现B4型结构;随着Al含量的增加,晶格常数减小,B1结构的薄膜择优取向由(111)向(220)转变.力学性能测试表明,适当Al含量可以提高薄膜的硬度、膜基结合强度及抗磨损性能;B1结构(Ti,Al)薄膜的氧化实验表明,随着Al含量的增加,薄膜抗氧化性能显著提高.
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