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OALib Journal期刊
ISSN: 2333-9721
费用：99美元
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用薄膜内耗仪测定薄膜应力
, PP. 1225-1227
Keywords: 内耗,形状记忆效应,薄膜应力
Abstract:
采用一种新的薄膜内耗仪观测Ni50Ti50薄膜样品的形变(薄膜形变造成薄膜与载膜硅片之间的界面应力)随温度或其它环境参量的变化．同步测量了薄膜的内耗、动态模量、薄膜应力以及Ni50Ti50薄膜的相变过程.
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