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OALib Journal期刊
ISSN: 2333-9721
费用：99美元
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多晶沉积薄膜生长过程中织构演变的模拟研究
, PP. 313-318
Keywords: 多晶薄膜,织构演变,组态熵
Abstract:
将织构组态熵的概念应用于沉积多晶薄膜织构演变的模拟研究，考虑薄膜沉积过程中晶体表面能各向异性及应变能各向异性的变化，建立了沉积薄膜晶体择优生长的定量模型；模拟了Al多晶薄膜沉积过程中晶体的生长规律，分析了织构演变的主要微观物理因素.
| [1] | 1Carel R, Thompson C V, Frost H J. Acta Mater, 1996; 44: 2479
|
| [2] | 2Waner F, Lamm L, Deparis D. Textures Microstruct, l995; 23: 249
|
| [3] | 3Li D Y, Szpunar J. Mater Sci Forum, 1994; 157-162: 1827
|
| [4] | 4Liu Y D, Wang Y D, Xu J Z, Hu X T. In: Liang Zhide, Zuo Liang eds., Proc 11th Int Coof onTedure of Materiais (ICOTOM-11), Vol.II, Xi'an, 1996: 1165
|
| [5] | 5Wang F, Xu J Z, Liang Z D. Pme 9th Int Coof on Textures of Materiale(JCOTOM-8), TheMetallurgical Society, Santa Fe, USA, 1987: 110
|
| [6] | 6王沿东,徐家桢金属学报,1995;31:B550(Wang Yandong, XU Jiazhen. Acta Metall Sin, 1995; 31: B550)
|
| [7] | 7Wang Y D, Liu Y D, Xu J Z, Liang Z D. J Appl Phys, 1996; 79: 7376
|
| [8] | 8Wang Y D, Vadon A, Heizmann J J, Xu J Z. Scr Mater, 1996; 35: 905
|
| [9] | 9陈仁烈统计物理引论北京:人民教育出版社,1959:104(Chen Renlie. The Intnduction Of Statisticnl Physics. Beijing: People's Education Press, 1959: 104)
|
| [10] | 10Mackenzie J K, Moore A J W, Nicholas J F. i Phys Chem Solids, 1962; 23: 185
|
| [11] | 11Baskes M I. Phys Rev, 1992; B46: 2727
|
| [12] | 12Daw M S, Baskes M I. Phys Rev Lett, 1983, 50: 1285
|
| [13] | 13Klokholm E, Berry B S. J Eletrochem Soc, 1968;115: 823
|
| [14] | 14Bassett G A, Menter J W, Bashley D W. Proc R Soc London, 1958; A246: 345
|
| [15] | 15Toth L S, Gilormini P, Jonas J J. Acta Metall, 1988; 36: 3077
|
| [16] | 16Braun J, Sambridge M. Nature, 1995; 376: 6542
|
| [17] | 17Li D Y, ffecaniere C, Das S, Szpunar J A. Mater Sci Forvm, 1994; 157-162: 555
|
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