全部 标题 作者
关键词 摘要

OALib Journal期刊
ISSN: 2333-9721
费用:99美元

查看量下载量

相关文章

更多...
金属学报  2005 

脉冲偏压对电弧离子镀Ti/TiN纳米多层薄膜显微硬度的影响

, PP. 1106-1110

Keywords: 脉冲偏压,电弧离子镀,Ti/TiN纳米多层薄膜

Full-Text   Cite this paper   Add to My Lib

Abstract:

采用脉冲偏压电弧离子镀方法在高速钢基体上沉积Ti/TiN纳米多层薄膜,采用正交实验法设计脉冲偏压电参数,考察脉冲偏压对Ti/TiN纳米多层薄膜显微硬度的影响。结果表明,在所有偏压参数(脉冲偏压幅值、占空比和频率)和几何参数(调制周期和周期比)中,脉冲偏压幅值是影响显微硬度的最主要因素;当沉积工艺中脉冲偏压幅值为900V、占空比为50%及频率为30kHz时,薄膜硬度可高达34.1GPa,此时多层膜调制周期为84nm,TiN和Ti单元层厚度分别为71和13nm;由于薄膜中的单层厚度较厚,纳米尺寸的强化效应并未充分体现于薄膜硬度的贡献中,硬度的提高主要与脉冲偏压工艺,尤其是脉冲偏压幅值对薄膜组织的改善有关。

References

[1]  Holleck H, Schier V. Surf Coat Technol, 1995; 76/77: 328
[2]  Jensen H, Sorensen G, Mannike I, Maktepavela F, Sobota J. Surf Coat Technol, 1999; 116/119: 1070
[3]  Kikuchi N, Kitagawa M, Sato A, Kusano E, Nanto H, Kinbara A. Surf Coat Technol, 2000; 126: 131
[4]  Holmberg K, Ronkainen H, Mathews A. In: Proc. First World Tribology, Coating Tribology Contact Mechanisms and Surface Design. London, UK: Congress, 1977: 251
[5]  Musil J, Zeman P, Hruby H, Mayrhofer P H. Surf Coat Technol, 1999; 120-121: 179
[6]  Wen L S,Huang R F.Vacuum,2000;(1):1(闻立时,黄荣芳.真空,2000;(1):1)
[7]  Olbrich W, Fessmann J, Kampschulte G, Ebberink J. Surf Coat Technol, 1991; 49: 258
[8]  Huang M D,Lin G Q,Dong C,Sun C,Wen L S.Acta Metall Sin,2003;39:510(黄美东,林国强,董闯,孙超,闻立时.金属学报,2003;39:510)
[9]  Huang M D,Sun C,Lin G Q,Dong C,Wen L S.Acta Metall Sin,2003;39:516(黄美东,孙超,林国强,董闯,闻立时.金属学报,2003;39:516)
[10]  Bai X,Lin G Q,Dong C,Wen L S.Acta Metall Sin,2004;40:1069(白晓,林国强,董闯,闻立时.金属学报,2004;40:1069)
[11]  Huang M D, Lee Y P, Dong C, Lin G Q, Sun C, Wen L S. J Vac Sci Technol, 2004; 22A: 250
[12]  Klug H P,Alexander L E,Translated by Sheng S X.X Ray Diffraction Procedures for Polycrystalline and Amorphous Materials.Beijing:Metallurgical Industry Press,1986:421(Klug H P,Alexander L E,盛世雄译.X射线衍射技术——多晶体和非晶质材料.北京:冶金工业出版社,1986:421)
[13]  Wen L S, Huang R F, Guo L P, Gong J, Wei T Y, Chuang Y Z.J Magn Magn Mater, 1993; 126: 200
[14]  Mattox D M. J Vac Sci Technol, 1989; 7A: 1105
[15]  Dai Z L, Wang YN.J Appl Phys, 2002; 92: 6428
[16]  Messier R, Giri A P, Roy R A. J Vac Sci Technol, 1984;A2(2): 500
[17]  Li T S, Li H, Pan F. Surf Coat Technol, 2001; 137: 225
[18]  Perry J, Treglio J R, Tian A F. Surf Coat Technol, 1995;76/77: 815
[19]  Dueck A, Gamer N, Gesatzke W, Griepentrog M, Oesterle W, Sahre M, Urban I. Surf Coat Technol, 2001; 142-144:579C

Full-Text

Contact Us

service@oalib.com

QQ:3279437679

WhatsApp +8615387084133