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OALib Journal期刊
ISSN: 2333-9721
费用：99美元
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Ti(0001)表面低能沉积Ti原子的分子动力学模拟
, PP. 211-216
Keywords: 分子动力学,(MD),嵌入原子法,(EAM),溅射,吸附,空位
Abstract:
采用嵌入原子势,运用分子动力学(MD)研究了Ti(0001)表面低能沉积不同能量Ti原子时表面吸附、溅射和空位的变化.低能Ti原子沉积Ti(0001)表面过程中,存在一个溅射能量阈值,其值大约为40---50eV.入射原子能量低于溅射阈值时,入射原子可以认为是沉积原子;入射原子能量大于溅射阈值时,溅射产额随入射原子能量的增加而线性增加.表面吸附原子和溅射原子的分布都呈现6次旋转对称,当入射原子能量大于溅射阈值时,表面吸附原子主要是基体表层原子,入射原子直接成为表面吸附原子的概率很小.空位缺陷主要分布在基体的最表层,当入射原子能量大于溅射阈值时,基体次表层产生的空位缺陷随入射原子能量的增加而增多.
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