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OALib Journal期刊
ISSN: 2333-9721
费用：99美元
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C含量对TiWCN复合膜微结构、力学性能和摩擦磨损性能的影响
DOI: 10.11900/0412.1961.2014.00183, PP. 1350-1356
Keywords: 磁控溅射,TiWCN复合膜,微结构,力学性能,摩擦磨损性能
Abstract:
采用磁控溅射仪制备了一系列不同C含量的TiWCN复合膜.利用XRD,SEM,纳米压痕仪和高温摩擦磨损仪等对TiWCN复合膜的微结构、力学性能和摩擦磨损性能进行了表征.结果表明TiWCN复合膜由fcc结构的TiWCN相和六方结构的Ti2N相组成;随着C含量增加,薄膜硬度先升高后降低,室温摩擦系数逐渐减小,而磨损率先减小后增大.当C含量为11.25%时,硬度达到最大值,为35.97GPa;磨损率获得最小值,为1.26×10-5mm3·N-1·m-1.当C含量为13.68%时,摩擦系数最小,为0.32.当温度低于370℃时,TiWCN复合膜的摩擦系数和磨损率小于TiWN薄膜;当温度超过370℃时,TiWCN复合膜的摩擦系数和磨损率大于TiWN薄膜.C添加到TiWN薄膜中提高了薄膜的力学性能和常温摩擦磨损性能,而薄膜的高温摩擦磨损性能并未得到改善.
| [1] | Gustavsson L E, Baránková H, Bárdos L. Surf Coat Technol, 2006; 201: 1464
|
| [2] | Veprek S, Veprek-Heijman M J G. Surf Coat Technol, 2008; 202: 5063
|
| [3] | Pan L, Bai Y Z, Zhang D, Wang J. Rare Met, 2012; 31: 183
|
| [4] | Neidhardt J, Czigány Z, Sartory B, Tessadri R, Mitterer C. Int J Refract Met Hard Mater, 2010; 28: 23
|
| [5] | Yu L H, Xue A J, Dong S T, Xu J H. Trans Mater Heat Treat, 2010; 31: 140 (喻利花, 薛安俊, 董松涛, 许俊华. 材料热处理学报, 2010; 31: 140)
|
| [6] | Ezura H, Ichijo K, Hasegawa H, Yamamoto K, Hotta A, Suzuki T. Vacuum, 2008; 82: 476
|
| [7] | Caicedo J C, Yate L, Montes J. Surf Coat Technol, 2011; 205: 2947
|
| [8] | Manory R R, Mollica S, Ward L, Purushotham K P, Evans P, Noorman J, Perry A J. Surf Coat Technol, 2002; 155: 136
|
| [9] | Tian B, Yue W, Fu Z Q, Gu Y H, Wang C B, Liu J J. Vacuum, 2014; 99: 68
|
| [10] | Gassner G, Mayrhofer P H, Kutschej K, Mitterer C, Kathrein M. Surf Coat Technol, 2006; 201: 3335
|
| [11] | Chang C L, Hsieh T J. J Mater Process Technol, 2009; 209: 5521
|
| [12] | Yu L H, Ma B Y, Xu J H. Acta Metall Sin, 2012; 48: 469 (喻利花, 马冰洋, 许俊华. 金属学报, 2012; 48: 469)
|
| [13] | Zhang X H, Jiang J Q, Zeng Y Q, Lin J L,Wang F L, Moore J J. Surf Coat Technol, 2008; 203: 594
|
| [14] | Xu J H, Cao J, Yu L H. Acta Metall Sin, 2012; 48: 555 (许俊华, 曹 峻, 喻利花. 金属学报, 2012; 48: 555)
|
| [15] | Cheng G A, Han D Y, Liang C L,Wu X L, Zheng R T. Surf Coat Technol, 2013; 228: S328
|
| [16] | Li C Y, Chen L. Iron Steel Res, 1991; (2): 41 (李长一, 陈 亮. 钢铁研究, 1991; (2): 41)
|
| [17] | Chen R, Tu J P, Liu D G, Mai Y J, Gu C D. Surf Coat Technol, 2011; 205: 5228
|
| [18] | Xue Q J, Wang L P. Diamond-Like Carbon Film Materials. Beijing: Science Press, 2012: 18 (薛群基, 王立平. 类金刚石碳基薄膜材料. 北京: 科学出版社, 2012: 18)
|
| [19] | Martínez-Martínez D, Sánchez-López J C, Rojas T C, Fernández A, Eaton P, Belin M. Thin Solid Films, 2005; 472: 64
|
| [20] | Ertürk E, Knotek O, Burgmer W, Prengel H G, Heuvel H J, Dederichs H G, St?ssel C. Surf Coat Technol, 1991; 46: 39
|
| [21] | Aliofkhazraei M, Sabour Rouhaghdam A. Surf Coat Technol, 2010; 205: S51
|
| [22] | Yamamoto T, Kawate M, Hasegawa H, Suzuki T. Surf Coat Technol, 2005; 193: 372
|
| [23] | Wu W Y, Wu C H, Xiao B H, Yang T X, Lin S Y, Chen P H, Chang C L. Vacuum, 2013; 87: 209
|
| [24] | Zhang L Q, Yang H S, Pang X L, Gao K W, Volinsky A A. Surf Coat Technol, 2013; 224: 120
|
| [25] | Lin J L, Moore J J, Mishra B, Pinkas M, Sproul W D. Acta Mater, 2010; 58: 1554
|
| [26] | Ziegele H, Rebholz C, Voevodin A A, Leyland A, Rohde S L, Matthews A. Tribology Int, 1997; 30: 845
|
| [27] | Chen X Y, Wang Z H, Ma S L, Ji V. Diamond Relat Mater, 2010; 19: 1336
|
| [28] | Aizawa T, Mitsuo A, Yamamoto S, Sumitomo T, Muraishi S. Wear, 2005; 259: 708
|
| [29] | Zeman P, Musil J. Appl Surf Sci, 2006; 252: 8319
|
| [30] | Aubert A, Danroc J, Gaucher A. Thin Solid Films, 1985; 126 : 61
|
| [31] | Aizawa T, Mitsuo A, Yamamoto S, Sumitomo T, Muraishi S. Wear, 2005; 259: 708
|
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