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OALib Journal期刊
ISSN: 2333-9721
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化学气相沉积法制备氮化钛
Keywords: 化学气相沉积,源物质,氮化钛,制备
Abstract:
本文以氮化钛的CVD制备为例,说明了源物质的选择对CVD过程的影响.在此基础上,综述了化学气相沉积技术在材料制备领域的最新进展.
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