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OALib Journal期刊
ISSN: 2333-9721
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金属β－二酮化合物用于MOCVD法生长铁电氧化物薄膜*
Keywords: 金属β-二酮化合物,金属有机化学气相沉积,铁电薄膜
Abstract:
对用于MOCVD法生长铁电氧化物薄膜的金属β－二酮化合物的制备、结构及性质进行了评述，对它们在生长铁电薄膜中的应用现状进行了介绍，并对它们的应用前景作了展望。
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