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氩气和氪气作为ECR中和器工质的性能比较

DOI: 10.13336/j.1003-6520.hve.2015.09.004, PP. 2850-2855

Keywords: 电子回旋共振等离子体,ECR中和器,电子束流,工质利用效率,电子损耗,氩气,氪气,引出电压

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Abstract:

为比较使用不同气体工质的电子回旋共振(ECR)中和器的性能,在真空环境下,用一个电子收集板模拟离子的作用,将电子电流从ECR中和器中引出,实验研究了以氩气和氪气为工质时,ECR中和器引出电子电流的大小以及中和器的性能。实验结果表明以氩气为工质,ECR中和器在体积流量0.8mL/min时,88.6V电压可引出103.8mA的电子电流,工质利用效率和电子损耗分别为1.2789W/A和194.573W/A;以氪气为工质,ECR中和器在体积流量0.6mL/min时,75V电压可引出108mA电子电流,工质利用效率和电子产生损耗分别为1.7832W/A和176.7W/A。以氪气为工质的中和器性能明显优于氩气,但2种工质都可以满足ECR离子源中和离子束流的需要。

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