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一体化微操作器误差分析与建模

, PP. 136-140

Keywords: 微操作器,误差分析,柔性铰链,压电陶瓷

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Abstract:

为评价各种误差对微操作器精度的影响,以一体化超精密微操作器为研究对象,分析了加工误差、机构原理误差、测量误差、环境带来的误差以及驱动误差等造成微操作器精度降低的因素,建立了加工误差的偏微分方程解析模型,并用有限元仿真验证了加工误差模型的准确性。在详细分析误差源的基础上,提出了提高微操作器精度的措施。

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