王立鼎, 罗 怡.中国ME MS的研究与开发进程[J].仪表技术与传感器,2003,1(1),1-3. WANG Liding,LUO Yi. Research and development of MEMS in China[J]. Instrument Technique and Sensor, 2003,1(1),1-3.(in Chinese)
[2]
林世荣.地震仪器指标体系研究与MEMS仪器设计[D].哈尔滨:中国地震局工程力学研究所,2012. LIN Shirong. Research on specification system of seismometers and design of MEMS accelerograph[J]. Harbin: Institute of Engineering Mechanics, 2012.(in Chinese)
[3]
李学东,余志伟. 基于MEMS技术的微型传感器[J]. 仪表技术与传感器,2005,9:4-5,12. LI Xuedong,YU Zhiwei . Micro sensors based on MEMS technology[J]. Instrument Technique and Sensor,2005,9:4-5,12.(in Chinese)
[4]
郝一龙,等.硅基 MEMS技术[J].机械强度,2001,23(4):523-526. HAO Yilong.Technology of silicon-based MEMS[J]. Journal of Mechanical strength, 2001,23(4):523-526.(in Chinese)
[5]
王展飞,鲁文高.MEMS振动陀螺闭环自激驱动的理论分析及数值仿真[J].传感技术学报,2008,8(21):1337-1342. WANG Zhanfei,LU Wengao. Theoetical analysis and numerical simulation of closed-loop self-oscillation system for MEMS vibratory gyroscopes[J]. Chinese Journal of Sensors and Actuators, 2008,8(21):1337-1342.(in Chinese)
[6]
陈立国,凌云峰. MEMS压力传感器自动组装系统[J]. 纳米技术与精密工程,2008,6(4):297-301. CHEN Liguo,LING Yunfeng.Automatic micro assembly system for MEMS pressure sensor packaging[J].Nanotechnology and Precision Engineering, 2008, 6(4):297-301.(in Chinese)
[7]
陈立国,孙立宁,荣伟彬.MEMS器件微装配系统的设计与研制[J].中国机械工程,2005,16(14):1226-1228, 1232. CHEN Liguo, SUN Lining, RONG Weibin. Design and development of MEMS assembly system[J].China Mechanical Engineering, 2005, 16(14): 1226-1228,1232.(in Chinese)
[8]
曹晓棠,石云波. 基于MEMS的微型飞行器姿态测量系统[J].传感器与微系统,2013,23(2):122-127. CAO Xiaotang,SHI Yunbo. Attitude measurement system for based on MEMS[J].Transducer and Microsystems Tech nologies, 2013,23(2):122-127.(in Chinese)
[9]
高宗余,李德胜. 多MEMS传感器姿态测量系统的研究[J].电光与控制,2010,17(3):68-70. GAO Zongyu,LI Desheng. Attitude measurement system based on multiple MEMS sensors[J].Electronics Optics&Control, 2010,17(3):68-70.(in Chinese)
[10]
孙凤鸣,傅 星. 基于MEMS的微位移传感器及其应用研究[J].传感技术学报,2013,26(2):293-296. SUN Fengming,FU Xing. MEMS based micro displacement sensor and Its application[J].Chinese Journal of Sensors and Actuatiors, 2013,26(2):293-296.(in Chinese)
[11]
彭孝东,陈 瑜. MEMS三轴数字陀螺仪标定方法研究[J]. 传感器与微系统,2013,32(6):63-65,69. PENG Xiaodong,CHEN Yu. Study on calibration method of MEMS 3-axis digital gyroscope[J]. Transducer and Microsystems Technologies, 2013,32(6):63-65,69.(in Chinese)
[12]
任建新,杜亚宁.实用的MEMS惯性器件外场标定方法[J].传感器与微系统,2014,33(6):27-30. REN Jianxin,DU Yaning. Outfield calibration method for practical MEMS inertial device[J].Transducer and Microsystems Technologies, 2014,33(6):27-30.(in Chinese)
[13]
李圣怡,刘宗林.微加速度计研究的进展[J].国防科技大学学报,2004, 26(6):34-37. LI Shengyi,LIU Zonglin. Developments of micro accelerometer research[J].Journal of National University of Defense Technology, 2004, 26(6):34-37.(in Chinese)
[14]
刘 宇,等,MEMS加速度传感器计量检测技术的研究进展[J].计测技术,2010,30:5-8. LIU Yu. Research progress of gauge check technology of MEMS accelerometers[J].Metrology & Measurement Technology,2010, 30:5-8.(in Chinese)
[15]
F Mohd-Yasin, Nagel D J, Korman C E. Noise in MEMS[J].Meas. Sci. Technol, 2010, 21.
[16]
Mikko Saukoshi,Lasse Aaltonen. Fully integrated charge sensitive amplifier for readout of micromechanical capacitive sensors[C]// ISCAS 2005:5377-5380.
[17]
Cochran E S, Lawrence J F, Christensen Cet al. The Quake-Catcher Network: Citizen science expanding seismic horizons[J]. Seism. Res. Letts., 2009, 80, 26-30.
[18]
B. John Merchant. MEMS applications in seismology[J]. Seismic Instrumentation Technology Symposium,2009,11.
