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MEMS微型热敏传感器数值模拟

Keywords: 微电子机械系统(MEMS),微型热敏传感器,灵敏度,三维数值模拟

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Abstract:

借助计算流体动力学软件Fluent,采用有限体积法、非定常N-S方程、Realizablek-ε湍流模型及无滑移壁面边界条件对微电子机械系统(MEMS)微型热敏传感器进行三维数值模拟.全面地分析了传感器绝缘层材料、空腔内介质材料以及结构尺寸参数对其灵敏度的影响情况,探讨了提高传感器灵敏度的方法.同时,设计了一款高灵敏度的MEMS微型热敏传感器.数值模拟结果发现,采用具有较低热导率的结构材料及工作气体,隔热效果最佳;合理优化传感器尺寸参数有助于获得较高的灵敏度.该结果对微型热敏传感器的优化设计和实际加工、制造提供了依据.

References

[1]  马炳和,周保清,邓进军,等.MEMS微型热敏传感器的隔热结构及其性能分析[J]. 传感技术学报,2008,21(6):933-937. Ma Binghe, Zhou Baoqing, Deng Jinjun, et al. On heat insulation of micro thermal sensor using FEA[J]. Chinese Journal of Sensors and Actuators,2008,21(6):933-937. (in Chinese)
[2]  Lennart L, Mohamed G. MEMS-based pressure and shear stress sensors for turbulent flows[J]. Meas Sci Technol, 1999,10:665-686.
[3]  Yoshino Takashi, Suzuki Yuji, Kasagi Nobuhide. Assessment of the wall shear stress measurement with arrayed micro hot-film sensors in a turbulent channel flow//Proceedings of 2nd Int Symp on Turbulence and Shear Flow Phenomena. Stockholm:, 2001:153-158.
[4]  许正,李万平.MEMS壁剪应力传感器热效应的数值模拟[J].传感器与微系统,2006,25(12):32-35. Xu Zheng, Li Wanping. Numerical simulation for the thermal effect of MEMS wall shear stress sensors[J]. Transducer and Micro-system Techniques, 2006,25(12):32-35. (in Chinese)
[5]  王竹萍,仲顺安,聂丹丹,等.微型热式剪应力传感器的热特性建模[J].北京理工大学学报,2010,30(9):1112-1116. Wang Zhuping, Zhong Shun\'an, Nie Dandan, et al. Mathematical modeling of micro thermal shear stress sensor[J]. Transactions of Beijing Institute of Technology, 2010,30(9):1112-1116. (in Chinese)
[6]  丁英涛,逯海波,仲顺安,等.微型剪应力传感器的热特性分析[J].北京理工大学学报,2009,29(5):427-430. Ding Yingtao, Lu Haibo, Zhong Shun\'an, et al. Thermal analysis of a micro shear stress sensor[J]. Transactions of Beijing Institute of Technology,2009,29(5):427-430. (in Chinese)
[7]  江帆,黄鹏.Fluent高级应用与实例分析[M]. 北京:清华大学出版社,2008∶8-16. Jiang Fan, Huang Peng. Advanced application and example analysis on fluent[M]. Beijing:Tsinghua University Press, 2008:8-16. (in Chinese)

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