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基于衬底偏压电场调制的高压器件新结构及耐压模型

Keywords: 衬底偏压,电场调制,击穿电压,耐压模型

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Abstract:

提出一种基于衬底偏压电场调制的薄层硅基LDMOS高压器件新结构,称为SBLDMOS.通过在高阻P型衬底背面注入N+薄层,衬底反偏电压的电场调制作用重新分配体内电场,纵向漏端电压由源端和漏端下两个衬底PN结分担,器件的击穿特性显著改善.求解漂移区电势的二维Poisson方程,获得表面电场和击穿电压的解析式,研究器件结构参数对表面电场和击穿电压的影响.仿真结果表明,与埋层LDMOS相比,SBLDMOS击穿电压提高63%.

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