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电化学  2006 

CO_2激光-化学腐蚀制作金阵列微电极

, PP. 429-433

Keywords: 微流控芯片,金电极,CO2激光

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Abstract:

微电极的制作是微流控芯片电化学检测的关键技术.本文提出CO2激光烧蚀结合化学腐蚀快速制作微流控芯片阵列微电极的方法.在溅射Au/Cr的玻璃基片上涂敷指甲油作牺牲层,利用CO2激光烧蚀开窗口,经化学腐蚀后获得阵列电极,电极宽度为100μm.考察了激光加工参数及牺牲层对电极加工质量的影响,对由键合包封制作的微流控芯片,循环伏安及流动注射分析测试表明,该电极芯片可用于微流控芯片的安培检测.

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