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一种应用正态分布理论的直线超声电机精密定位控制方法

, PP. 60-65

Keywords: 直线超声电机,定位平台,宏微驱动,大行程,精密定位

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Abstract:

针对直线超声电机在精密驱动过程中存在较强的非线性、时变性及控制模型复杂等问题,提出了一种基于正态分布理论统计直线超声电机驱动电压与速度/位移关系的方法,结合模糊逻辑控制技术,实现了对直线超声电机精密定位控制。利用宏微驱动控制模式对超声电机驱动的平台进行大行程、高精度定位实验研究,实验结果表明采用所提方法,当行程为5mm时,稳态误差小于5nm,能抑制系统的超调,改善系统动态性能。同时,由于直线超声电机动态保持力非常大,使得系统具有良好的抗扰动能力。

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