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科学通报  2013 

图案化金属铜膜的SIAD法自组装制备

DOI: 10.1360/972012-846, PP. 1764-1768

Keywords: 图案化金属铜膜,小入射角沉积(SIAD),定向压应力,层-线状生长,自组装制备

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Abstract:

利用新发展的小入射角沉积(SIAD)技术在玻璃衬底上自组装制备了图案化金属铜膜.利用金相显微镜(MM)、扫描电子显微镜(SEM)、透射电子显微镜(TEM)/选区电子衍射(SAED)/能量弥散X射线光谱仪(EDX)以及X射线衍射仪(XRD)等技术对所制备的图案化金属铜膜进行了表征.通过分析对比SIAD和垂直入射沉积(NID)铜沉积物的形貌和结构差异,揭示了图案化金属铜膜的形成机理.

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