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多层膜结构热应力计算

DOI: 10.6052/1000-0879-14-107, PP. 453-456

Keywords: 多层膜,热应力,简化计算

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Abstract:

多层保护膜结构在光学窗口等领域有广泛应用,其中膜层中的热应力对系统的功能和可靠性有重要影响.推导了条形多层薄膜结构系统中应力应变的计算方法,并针对薄膜厚度远小于基底厚度的薄膜结构计算进行了相应的简化,得到了其一阶近似以及零阶近似应力的计算公式.采用此公式对ZnS-Y2O3-SiO2双层膜系红外窗口系统进行了求解分析.计算结果显示,热应力在两层薄膜上的相对误差分别为1.54%和0.09%,零阶近似可以很好地满足计算精度要求.

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