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斜入射溅射Ni-7Cr-8Al涂层及其表面热生长氧化膜组织结构表征

, PP. 86-90

Keywords: 磁控溅射,Ni-Cr-Al,氧化膜

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Abstract:

研究了1Cr18Ni9Ti不锈钢基体上斜入射溅射Ni-7Cr-8Al涂层及其在1000℃空气中形成的氧化膜的组织结构.涂层采用Ni-7Cr-8Al合金靶磁控溅射方法制备.沉积过程中样品静止不动,名义入射角分别为0°和45°.这两种样品在本文中分别称为正入射和斜入射沉积涂层.研究结果表明两种涂层的晶体结构均为f.c.c.γ-Ni,并且都具有典型的柱状晶组织结构,所不同的是,正入射沉积涂层的柱状晶垂直表面,斜入射涂层的柱状晶与法线间的角度大约为32°,并且后者看起来较疏松.在1000℃空气中50h内,正入射沉积Ni-7Cr-8Al涂层表面可形成纯α-Al2O3保护性氧化膜,斜入射涂层氧化行为较复杂.氧化10h后的涂层表面为均匀致密的α-Al2O3氧化物;氧化20h后氧化膜主要为等轴晶形状Fe2O3和NiCrO3,此外还有很多尺寸为几微米的小孔;氧化50h后,氧化物发生大面积剥落,氧化膜内有大量孔洞,残留的表面氧化物主要由Fe2O3和NiCrO3组成.

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