Vibration assisted nano impact-machining by loose abrasives (VANILA) is a novel nanomachining process that combines the principles of vibration assisted abrasive machining and tip-based nanomachining, to perform target specific nanoabrasive machining of hard and brittle materials. An atomic force microscope (AFM) is used as a platform in this process wherein nanoabrasives, injected in slurry between the workpiece and the vibrating AFM probe which is the tool, impact the workpiece and cause nanoscale material removal. The VANILA process are conducted such that the tool tip does not directly contact the workpiece. The level of precision and quality of the machined features in a nanomachining process is contingent on the tool wear which is inevitable. Initial experimental studies have demonstrated reduced tool wear in the VANILA process as compared to indentation process in which the tool directly contacts the workpiece surface. In this study, the tool wear rate during the VANILA process is analytically modeled considering impacts of abrasive grains on the tool tip surface. Experiments are conducted using several tools in order to validate the predictions of the theoretical model. It is seen that the model is capable of accurately predicting the tool wear rate within 10% deviation. 1. Introduction Well-known tip-based nanomachining processes such as nanoscratching and nanoindentation involve direct tool contact with the workpiece and result in high tool wear. Vibration assisted nano impact-machining by loose abrasives (VANILA) process, a noncontact vibration tip-assisted nanomachining process that uses loose abrasives, has been investigated and can be used to perform target specific impact-based machining of nanoscale features on hard and brittle materials, such as glass and ceramics materials [1, 2]. This process uses an AFM platform in which a slurry of nanodiamond abrasive particles is introduced between the tool and the workpiece. The machining is conducted in tapping mode where the tool vibrates at resonance within the slurry of abrasive nanoparticles. The impact of the tool along with the acoustic field generated moves the abrasive grain towards the workpiece surface causing a high velocity impact and material removal. A schematic of the VANILA process is shown in Figure 1. Figure 1: Schematic diagram of the VANILA process. The feasibility of nanoscale machining using the VANILA process was successfully demonstrated on hard and brittle materials such as borosilicate glass and silicon. Patterns of nanocavities were successfully machined to demonstrate
References
[1]
M. M. Sundaram and S. James, “Vibration assisted nano abrasive machining,” in Proceedings of the International Conference on Precision, Meso, Micro, and Nano Engineering, College of Engineering, Pune, India, 2011.
[2]
S. James and M. M. Sundaram, “A feasibility study of vibration-assisted nano-impact machining by loose abrasives using atomic force microscope,” Journal of Manufacturing Science and Engineering, vol. 134, no. 6, Article ID 61014, 2012.
[3]
R. Agrawal, N. Moldovan, and H. D. Espinosa, “An energy-based model to predict wear in nanocrystalline diamond atomic force microscopy tips,” Journal of Applied Physics, vol. 106, no. 6, Article ID 064311, 2009.
[4]
G. M. Robinson, M. J. Jackson, and M. D. Whitfield, “A review of machining theory and tool wear with a view to developing micro and nano machining processes,” Journal of Materials Science, vol. 42, no. 6, pp. 2002–2015, 2007.
[5]
C. Lu, Y. Gao, G. Michal, N. N. Huynh, H. T. Zhu, and A. K. Tieu, “Atomistic simulation of nanoindentation of iron with different indenter shapes,” Proceedings of the Institution of Mechanical Engineers Part J: Journal of Engineering Tribology, vol. 223, no. 7, pp. 977–984, 2009.
[6]
K. Komvopoulos and W. Yan, “Molecular dynamics simulation of single and repeated indentation,” Journal of Applied Physics, vol. 82, no. 10, pp. 4823–4830, 1997.
[7]
P.-Z. Zhu, Y.-Z. Hu, H. Wang, and T.-B. Ma, “Study of effect of indenter shape in nanometric scratching process using molecular dynamics,” Materials Science and Engineering A, vol. 528, no. 13-14, pp. 4522–4527, 2011.
[8]
H.-J. Kim, S.-S. Yoo, and D.-E. Kim, “Nano-scale wear: a review,” International Journal of Precision Engineering and Manufacturing, vol. 13, no. 9, pp. 1709–1718, 2012.
[9]
J. Liu, J. K. Notbohm, R. W. Carpick, and K. T. Turner, “Method for characterizing nanoscale wear of atomic force microscope tips,” ACS Nano, vol. 4, no. 7, pp. 3763–3772, 2010.
[10]
A. Khurshudov and K. Kato, “Wear of the atomic force microscope tip under light load, studied by atomic force microscopy,” Ultramicroscopy, vol. 60, no. 1, pp. 11–16, 1995.
[11]
M. L. Bloo, H. Haitjema, and W. O. Pril, “Deformation and wear of pyramidal, silicon-nitride AFM tips scanning micrometre-size features in contact mode,” Measurement: Journal of the International Measurement Confederation, vol. 25, no. 3, pp. 203–211, 1999.
[12]
K. Cheng, X. Luo, R. Ward, and R. Holt, “Modeling and simulation of the tool wear in nanometric cutting,” Wear, vol. 255, no. 7-12, pp. 1427–1432, 2003.
[13]
M. D'Acunto, “Theoretical approach for the quantification of wear mechanisms on the nanoscale,” Nanotechnology, vol. 15, no. 7, pp. 795–801, 2004.
[14]
B. Gotsmann and M. A. Lantz, “Atomistic wear in a single asperity sliding contact,” Physical Review Letters, vol. 101, no. 12, Article ID 125501, 2008.
[15]
S. James and M. M. Sundaram, “A molecular dynamics study of the effect of impact velocity, particle size and angle of impact of abrasive grain in the Vibration Assisted Nano Impact-machining by Loose Abrasives,” Wear, vol. 303, no. 1-2, pp. 510–518, 2013.
[16]
O. Sahin, C. F. Quate, O. Solgaard, and A. Atalar, “Resonant harmonic response in tapping-mode atomic force microscopy,” Physical Review B: Condensed Matter and Materials Physics, vol. 69, no. 16, Article ID 165416, 2004.
[17]
Q. Qi and G. J. Brereton, “Mechanisms of removal of micron-sized particles by high-frequency ultrasonic waves,” IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control, vol. 42, no. 4, pp. 619–629, 1995.
[18]
D. M. VandenBurg, The Sonochemical Remediation of Phthalate Esters: An Investigation into Products and Kinetics, University of Bath, Bath, UK, 2011.
[19]
J. P. Cleveland, B. Anczykowski, A. E. Schmid, and V. B. Elings, “Energy dissipation in tapping-mode atomic force microscopy,” Applied Physics Letters, vol. 72, no. 20, pp. 2613–2615, 1998.
[20]
S. M. Booij, Fluid Jet Polishing: Possibilities and Limitations of a New Fabrication Technique, 2003.
[21]
D. Maugis, “Adhesion of spheres: the JKR-DMT transition using a Dugdale model,” Journal of Colloid And Interface Science, vol. 150, no. 1, pp. 243–269, 1992.
[22]
R. Bassani and M. D'Acunto, “Nanotribology: tip-sample wear under adhesive contact,” Tribology International, vol. 33, no. 7, pp. 443–452, 2000.
[23]
T. D. B. Jacobs, B. Gotsmann, M. A. Lantz, and R. W. Carpick, “On the application of transition state theory to atomic-scale wear,” Tribology Letters, vol. 39, no. 3, pp. 257–271, 2010.
[24]
K. J. Laidler, “The development of the arrhenius equation,” Journal of Chemical Education, vol. 61, no. 6, pp. 494–498, 1984.
[25]
M. D'Acunto, “Controlling wear on nanoscale,” in Scanning Probe Microscopy in Nanoscience and Nanotechnology, pp. 647–686, Springer, 2010.
[26]
C. M. Bertoni, V. Bortolani, C. Calandra, and E. Tosatti, “Dielectric matrix and phonon frequencies in silicon,” Physical Review Letters, vol. 28, no. 24, pp. 1578–1581, 1972.
[27]
V. V. Tsukruk and V. N. Bliznyuk, “Adhesive and friction forces between chemically modified silicon and silicon nitride surfaces,” Langmuir, vol. 14, no. 2, pp. 446–455, 1998.
[28]
S. James and M. Sundaram, “Modeling of material removal rate in vibration assisted nano impact-machining by loose abrasives,” Journal of Manufacturing Science and Engineering, 2014.
