%0 Journal Article
%T Modeling of Tool Wear in Vibration Assisted Nano Impact-Machining by Loose Abrasives
%A Sagil James
%A Murali M. Sundaram
%J International Journal of Manufacturing Engineering
%D 2014
%R 10.1155/2014/291564
%X Vibration assisted nano impact-machining by loose abrasives (VANILA) is a novel nanomachining process that combines the principles of vibration assisted abrasive machining and tip-based nanomachining, to perform target specific nanoabrasive machining of hard and brittle materials. An atomic force microscope (AFM) is used as a platform in this process wherein nanoabrasives, injected in slurry between the workpiece and the vibrating AFM probe which is the tool, impact the workpiece and cause nanoscale material removal. The VANILA process are conducted such that the tool tip does not directly contact the workpiece. The level of precision and quality of the machined features in a nanomachining process is contingent on the tool wear which is inevitable. Initial experimental studies have demonstrated reduced tool wear in the VANILA process as compared to indentation process in which the tool directly contacts the workpiece surface. In this study, the tool wear rate during the VANILA process is analytically modeled considering impacts of abrasive grains on the tool tip surface. Experiments are conducted using several tools in order to validate the predictions of the theoretical model. It is seen that the model is capable of accurately predicting the tool wear rate within 10% deviation. 1. Introduction Well-known tip-based nanomachining processes such as nanoscratching and nanoindentation involve direct tool contact with the workpiece and result in high tool wear. Vibration assisted nano impact-machining by loose abrasives (VANILA) process, a noncontact vibration tip-assisted nanomachining process that uses loose abrasives, has been investigated and can be used to perform target specific impact-based machining of nanoscale features on hard and brittle materials, such as glass and ceramics materials [1, 2]. This process uses an AFM platform in which a slurry of nanodiamond abrasive particles is introduced between the tool and the workpiece. The machining is conducted in tapping mode where the tool vibrates at resonance within the slurry of abrasive nanoparticles. The impact of the tool along with the acoustic field generated moves the abrasive grain towards the workpiece surface causing a high velocity impact and material removal. A schematic of the VANILA process is shown in Figure 1. Figure 1: Schematic diagram of the VANILA process. The feasibility of nanoscale machining using the VANILA process was successfully demonstrated on hard and brittle materials such as borosilicate glass and silicon. Patterns of nanocavities were successfully machined to demonstrate
%U http://www.hindawi.com/journals/ijme/2014/291564/