Electrophysical Properties of Nanocrysyalline Platinum Thin Films

The results of research structural and phase state, termoresistive properties (resistivity, temperature coefficient of resistance (TCR)) in the range of temperature ΔТа = 300-630 К and tensoresistive properties (gauge factor) in the range of deformation Δεl1 = (0-1) %, Δεl2 = (0-2) % were presented. Thin films Pt have fcc structure with lattice parameter ā = 0,390 nm after condensation and annealing. The temperature dependences characterized by relatively large value of resistivity (ρ ~ 10 – 7 Ohm·m) and relatively small value of TCR (β ~ 10 – 4 K – 1) respectively. Strain properties characterized by a wide interval of elastic deformation (more than 1 %). The deformation coefficient of electron mean free path (λ0) ηλ0l ≈ 9 and changing electron mean free path Δλ0 ≈ = 2 nm were calculated.