System Dynamics and Adaptive Control for MEMS Gyroscope Sensor

This paper presents an adaptive control approach for Micro-Electro-Mechanical Systems (MEMS) z-axis gyroscope sensor. The dynamical model of MEMS gyroscope sensor is derived and adaptive state tracking control for MEMS gyroscope is developed. The proposed adaptive control approaches can estimate the angular velocity and the damping and stiffness coefficients including the coupling terms due to the fabrication imperfection. The stability of the closed-loop systems is established with the proposed adaptive control strategy. Numerical simulation is investigated to verify the effectiveness of the proposed control scheme.