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力学与实践 2009
EFFECT OF THE CUSP MAGNETIC FIELD ON FLOW FIELD AND PULLING RATE DURING SI SINGLE CRYSTAL GROWTH PROCESSES
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Abstract:
The growth process of industrial 8 inch single crystals is simulated by FLUTRAP(fluid flow and transport phenomena program), which is based on non-orthogonal grid and finite-volume method. The results show that the flow field inside the crucible and the pulling rate are oscillating during the growth processes. The pulling rate is fluctuating with a period of about 2 minutes. The fluctuation amplitude of the pulling rate could be reduced by applying a cusp magnetic field.