%0 Journal Article
%T EFFECT OF THE CUSP MAGNETIC FIELD ON FLOW FIELD AND PULLING RATE DURING SI SINGLE CRYSTAL GROWTH PROCESSES<br>硅生长过程中尖形磁场对流场及提拉速率的影响
%A 陈启生
%A 秦明
%A 邓谷雨
%J 力学与实践
%D 2009
%I 
%X The growth process of industrial 8 inch single crystals is simulated by FLUTRAP(fluid flow and transport phenomena program), which is based on non-orthogonal grid and finite-volume method. The results show that the flow field inside the crucible and the pulling rate are oscillating during the growth processes. The pulling rate is fluctuating with a period of about 2 minutes. The fluctuation amplitude of the pulling rate could be reduced by applying a cusp magnetic field.
%K Czochralski method
%K silicon single crystal
%K flowoscillation
%K pulling rate<br>提拉法
%K 单晶硅
%K 流动振荡
%K 提拉速率
%U http://www.alljournals.cn/get_abstract_url.aspx?pcid=6E709DC38FA1D09A4B578DD0906875B5B44D4D294832BB8E&cid=5D344E2AD54D14F8&jid=0BF5C9FB031A532ED0A6D99DC4F6181A&aid=7F7111E9AD9DF983E6B2C6ABC5189AF4&yid=DE12191FBD62783C&vid=4AD960B5AD2D111A&iid=E158A972A605785F&sid=B91E8C6D6FE990DB&eid=DB817633AA4F79B9&journal_id=1000-0879&journal_name=力学与实践&referenced_num=0&reference_num=17