Nanoindentation and Friction/Wear Behaviors of Magnetron Sputtered CNx/SiC Bilayer Films on Titanium(TA2)Substrate
TA2表面磁控溅射CNx/SiC薄膜的纳米压痕与摩擦磨损性能

The nano-indentation and friction/wear properties of CNx film in CNx/SiC(carbon nitride/silicon carbon) double layer thin film(SiC film as interlayer) deposited on titanium(TA2) substrate using magnetron sputtering at room temperature were investigated.The results show that the CNx film exhibited a nano-hardness of 15.80 GPa,a Young's modulus of 130.88 GPa and a hardness-to-modulus ratio of 0.121.When sliding against a Si3N4(silicon nitride) ball(2 mm in radius) using ball-on-disc type wear tester at room t...