%0 Journal Article
%T Nanoindentation and Friction/Wear Behaviors of Magnetron Sputtered CNx/SiC Bilayer Films on Titanium(TA2)Substrate<br>TA2表面磁控溅射CNx/SiC薄膜的纳米压痕与摩擦磨损性能
%A XU Xiao-jing
%A ZHUO Liu-cheng
%A XIA Deng-fu
%A WEI Bao-cun
%A HAO Xin-ni
%A <br>许晓静
%A 卓刘成
%A 夏登福
%A 韦宝存
%A 郝欣妮
%J 摩擦学学报
%D 2009
%I 
%X The nano-indentation and friction/wear properties of CNx film in CNx/SiC(carbon nitride/silicon carbon) double layer thin film(SiC film as interlayer) deposited on titanium(TA2) substrate using magnetron sputtering at room temperature were investigated.The results show that the CNx film exhibited a nano-hardness of 15.80 GPa,a Young's modulus of 130.88 GPa and a hardness-to-modulus ratio of 0.121.When sliding against a Si3N4(silicon nitride) ball(2 mm in radius) using ball-on-disc type wear tester at room t...
%K titanium substrate
%K thin films
%K nanoindentation
%K friction and wear
%K magnetron sputtering<br>钛基材
%K 薄膜
%K 纳米压痕
%K 摩擦磨损
%K 磁控溅射
%U http://www.alljournals.cn/get_abstract_url.aspx?pcid=6E709DC38FA1D09A4B578DD0906875B5B44D4D294832BB8E&cid=5D344E2AD54D14F8&jid=2F467A5C6371C830162AAA01D7DAD07A&aid=0E0872F1378E5C712D445D3628CA7A46&yid=DE12191FBD62783C&vid=771469D9D58C34FF&iid=38B194292C032A66&journal_id=1004-0595&journal_name=摩擦学学报&referenced_num=1&reference_num=0