Electrostatic Resistance for the Moving Plate in MEMS
MEMS动平板的切向静电阻力

Friction force is present in most microelectromechanical systems(MEMS),since they have a large surface area to volume ratio.Understanding of friction is necessary to improve the performance and reliability of MEMS.A model of electrostatic tangential force for smooth and two kinds roughness plates,which are square and pyramid asperities,was established based on the energy balance method.The factors of the microscale,superficial appearance,applied voltage,micro asperities or dents or holes needed by fabricati...