%0 Journal Article
%T Electrostatic Resistance for the Moving Plate in MEMS<br>MEMS动平板的切向静电阻力
%A SHEN Xue-jin
%A HOU Li-cheng
%A <br>沈雪瑾
%A 侯利程
%J 摩擦学学报
%D 2008
%I 
%X Friction force is present in most microelectromechanical systems(MEMS),since they have a large surface area to volume ratio.Understanding of friction is necessary to improve the performance and reliability of MEMS.A model of electrostatic tangential force for smooth and two kinds roughness plates,which are square and pyramid asperities,was established based on the energy balance method.The factors of the microscale,superficial appearance,applied voltage,micro asperities or dents or holes needed by fabricati...
%K MEMS
%K microtribology
%K electrostatic resistance
%K surface roughness<br>MEMS
%K 微摩擦
%K 静电阻力
%K 表面粗糙度
%U http://www.alljournals.cn/get_abstract_url.aspx?pcid=6E709DC38FA1D09A4B578DD0906875B5B44D4D294832BB8E&cid=5D344E2AD54D14F8&jid=2F467A5C6371C830162AAA01D7DAD07A&aid=90838F60E6C9BA793B6ADF34C58277E2&yid=67289AFF6305E306&vid=D3E34374A0D77D7F&iid=B31275AF3241DB2D&journal_id=1004-0595&journal_name=摩擦学学报&referenced_num=0&reference_num=8