Synthesis of PS-Core Ceria-Shell Composite Abrasive and Its Application in Oxide CMP
核-壳结构PS/CeO_2复合磨料的制备及其氧化物化学机械抛光性能

Polystyrene (PS) microsphere prepared by soap-free emulsion polymerization was coated with CeO2 by chemical precipitation. As-prepared samples were analyzed by X-ray diffraction (XRD), transmission electron microscopy (TEM), selected area electron diffraction (SAED), field emission scanning electron microscopy (FESEM), energy dispersive analysis of X-rays (EDAX). Thermal oxide film on top of silicon wafer was polished by PS/CeO2 composite abrasives. The polished silicon wafer surface by novel composite abra...