%0 Journal Article
%T Synthesis of PS-Core Ceria-Shell Composite Abrasive and Its Application in Oxide CMP<br>核-壳结构PS/CeO_2复合磨料的制备及其氧化物化学机械抛光性能
%A CHEN Yang
%A LONG Ren-wei
%A CHEN Zhi-gang
%A DING Jian-ning
%A <br>陈杨
%A 隆仁伟
%A 陈志刚
%A 丁建宁
%J 摩擦学学报
%D 2010
%I 
%X Polystyrene (PS) microsphere prepared by soap-free emulsion polymerization was coated with CeO2 by chemical precipitation. As-prepared samples were analyzed by X-ray diffraction (XRD), transmission electron microscopy (TEM), selected area electron diffraction (SAED), field emission scanning electron microscopy (FESEM), energy dispersive analysis of X-rays (EDAX). Thermal oxide film on top of silicon wafer was polished by PS/CeO2 composite abrasives. The polished silicon wafer surface by novel composite abra...
%K PS/CeO2 composite abrasives
%K core-shell morphology
%K coating
%K chemical mechanical polishing<br>PS/CeO2复合磨料
%K 核－壳结构
%K 包覆
%K 化学机械抛光
%U http://www.alljournals.cn/get_abstract_url.aspx?pcid=6E709DC38FA1D09A4B578DD0906875B5B44D4D294832BB8E&cid=5D344E2AD54D14F8&jid=2F467A5C6371C830162AAA01D7DAD07A&aid=E30BB786F3AB024969BBD2F82577B9D1&yid=140ECF96957D60B2&vid=340AC2BF8E7AB4FD&iid=CA4FD0336C81A37A&sid=9CF7A0430CBB2DFD&eid=F3583C8E78166B9E&journal_id=1004-0595&journal_name=摩擦学学报&referenced_num=1&reference_num=0