Influence of Bias Voltage on the Tribological Properties of Graphite-Like Carbon Coatings Prepared by Magnetron Sputtering
基体偏压对磁控溅射类石墨镀层摩擦磨损性能的影响

Graphite-like carbon(GLC) composite coatings were deposited on silicon(100) and W6Mo5Cr4V2 High Speed Steel(HSS) substrate by using four targets unbalanced magnetron sputter ion plating technique.The relation among substrate bias voltage and hardness,friction coefficient,specific wear rate of the coatings were investigated,respectively.Influence of bias voltage on surface and cross-section morphology,microstructure of the coatings were analyzed by SEM and TEM,respectively.As the acceleration of substrates b...