%0 Journal Article
%T Influence of Bias Voltage on the Tribological Properties of Graphite-Like Carbon Coatings Prepared by Magnetron Sputtering<br>基体偏压对磁控溅射类石墨镀层摩擦磨损性能的影响
%A YAN Shao-ping
%A JIANG Bai-ling
%A SU Yang
%A ZHANG Yong-hong
%A <br>严少平
%A 蒋百灵
%A 苏阳
%A 张永宏
%J 摩擦学学报
%D 2008
%I 
%X Graphite-like carbon(GLC) composite coatings were deposited on silicon(100) and W6Mo5Cr4V2 High Speed Steel(HSS) substrate by using four targets unbalanced magnetron sputter ion plating technique.The relation among substrate bias voltage and hardness,friction coefficient,specific wear rate of the coatings were investigated,respectively.Influence of bias voltage on surface and cross-section morphology,microstructure of the coatings were analyzed by SEM and TEM,respectively.As the acceleration of substrates b...
%K unbalanced magnetron sputtering
%K C/Cr composite graphite-likecarbon coatings
%K Bias voltage
%K tribological property
%K microstructure<br>非平衡磁控溅射
%K GLC-Cr复合镀层
%K 基体偏压
%K 摩擦磨损性能
%K 显微结构
%U http://www.alljournals.cn/get_abstract_url.aspx?pcid=6E709DC38FA1D09A4B578DD0906875B5B44D4D294832BB8E&cid=5D344E2AD54D14F8&jid=2F467A5C6371C830162AAA01D7DAD07A&aid=6CC65164E686996B6BD7885F36C1FB76&yid=67289AFF6305E306&vid=D3E34374A0D77D7F&iid=B31275AF3241DB2D&journal_id=1004-0595&journal_name=摩擦学学报&referenced_num=1&reference_num=17