Tribological Performance of ZrN Ceramic Thin Films with Ti Additions
掺杂不同钛含量氮化锆薄膜的制备

Using the unbalanced magnetron sputtering method, ZrN thin films with addition of varying content of Ti, namely Zr-Ti-N, were obtained, and then were characterized and studied for wear resistance. As the Ti content increased, the hardness increased, reaching a maximum value 2483HK0.025 at 18.7 at. % Ti. However, the film with addition of 16.5 at. % Ti showed the best wear performance and the highest critical loads.