%0 Journal Article
%T Tribological Performance of ZrN Ceramic Thin Films with Ti Additions<br>掺杂不同钛含量氮化锆薄膜的制备
%A YAO Sun-hui
%A SU Yan-liang
%A GAO Wen-xian
%A CHENG Kai-wen
%A <br>姚舜晖
%A 苏演良
%A 高文显
%A 郑凯文
%J 摩擦学学报
%D 2006
%I 
%X Using the unbalanced magnetron sputtering method, ZrN thin films with addition of varying content of Ti, namely Zr-Ti-N, were obtained, and then were characterized and studied for wear resistance. As the Ti content increased, the hardness increased, reaching a maximum value 2483HK0.025 at 18.7 at. % Ti. However, the film with addition of 16.5 at. % Ti showed the best wear performance and the highest critical loads.
%K composite materials
%K Zr-Ti-N thin film
%K friction-wear performance<br>复合材料
%K Zr—Ti—N薄膜
%K 摩擦磨损性能
%U http://www.alljournals.cn/get_abstract_url.aspx?pcid=6E709DC38FA1D09A4B578DD0906875B5B44D4D294832BB8E&cid=5D344E2AD54D14F8&jid=2F467A5C6371C830162AAA01D7DAD07A&aid=008F6FFF219E19FD&yid=37904DC365DD7266&vid=96C778EE049EE47D&iid=94C357A881DFC066&sid=09AA1448D1EAF9C1&eid=1FF3CD54EFC256A1&journal_id=1004-0595&journal_name=摩擦学学报&referenced_num=0&reference_num=14