Survey of scheduling and control for multicluster tools
多组合设备的调度控制研究综述

Multicluster tools are increasingly adopted in semiconductor manufacturing. This survey introduces the configurations of multicluster tools, operation processes, constraints, and cyclic scheduling policy. The complexity of the multicluster tool scheduling is analyzed. Then, the state-of-the-art for modeling, analysis and algorithms are reviewed in terms of different configurations and fabrication processes; and the open problems are pointed out. Finally, future research directions are indicated.