%0 Journal Article
%T Survey of scheduling and control for multicluster tools<br>多组合设备的调度控制研究综述
%A ZHU Qing-hu
%A WU Nai-qi
%A TENG Shao-hua
%A <br>朱清华
%A 伍乃骐
%A 滕少华
%J 控制理论与应用
%D 2010
%I 
%X Multicluster tools are increasingly adopted in semiconductor manufacturing. This survey introduces the configurations of multicluster tools, operation processes, constraints, and cyclic scheduling policy. The complexity of the multicluster tool scheduling is analyzed. Then, the state-of-the-art for modeling, analysis and algorithms are reviewed in terms of different configurations and fabrication processes; and the open problems are pointed out. Finally, future research directions are indicated.
%K semiconductor manufacturing
%K multicluster tools
%K scheduling control
%K scheduling algorithms
%K modeling<br>半导体制造
%K 多组合设备
%K 调度与控制
%K 调度算法
%K 建模
%U http://www.alljournals.cn/get_abstract_url.aspx?pcid=5B3AB970F71A803DEACDC0559115BFCF0A068CD97DD29835&cid=8240383F08CE46C8B05036380D75B607&jid=970898A57DFC021F93AB51667BAED7F7&aid=1699FE5260A6D2E51B92CDC34D4A068F&yid=140ECF96957D60B2&vid=DB817633AA4F79B9&iid=F3090AE9B60B7ED1&sid=01471B003B2963CC&eid=A9251EF312FA9D67&journal_id=1000-8152&journal_name=控制理论与应用&referenced_num=0&reference_num=0