Adjusting-controlling on gassing and energy for high power excimer laser based on intelligence
基于智能的大功率准分子激光器配气与能量的调控

The system, which adopts gas and energy as controlling measure, is a nonlinear and variable delay time system. To confirm such a system's accurate mathematical model and optimum answer is very difficult. A new method is presented to form a set of fuzzy control rules by means of human operator's control actions and proposes an intelligence control method based on the knowledge/reasoning regulation. It is guided with the knowledge base ,to realize fast reaction and high precision. This device has the features of easy to operate, flexible control and small error. Measurements show that the device is stable and practicable.