%0 Journal Article
%T Adjusting-controlling on gassing and energy for high power excimer laser based on intelligence<br>基于智能的大功率准分子激光器配气与能量的调控
%A FAN You-ping
%A HUANG Xi-yue
%A YU Yin-shan
%A <br>樊友平
%A 黄席樾
%A 余吟山
%J 控制理论与应用
%D 2002
%I 
%X The system, which adopts gas and energy as controlling measure, is a nonlinear and variable delay time system. To confirm such a system's accurate mathematical model and optimum answer is very difficult. A new method is presented to form a set of fuzzy control rules by means of human operator's control actions and proposes an intelligence control method based on the knowledge/reasoning regulation. It is guided with the knowledge base ,to realize fast reaction and high precision. This device has the features of easy to operate, flexible control and small error. Measurements show that the device is stable and practicable.
%K excimer laser
%K intelligent control
%K variable control universe
%K non-linear<br>准分子激光器
%K 智能控制
%K 变控制量论域
%K 非线性
%U http://www.alljournals.cn/get_abstract_url.aspx?pcid=5B3AB970F71A803DEACDC0559115BFCF0A068CD97DD29835&cid=8240383F08CE46C8B05036380D75B607&jid=970898A57DFC021F93AB51667BAED7F7&aid=F5ECAA8F77F60532&yid=C3ACC247184A22C1&vid=2A8D03AD8076A2E3&iid=E158A972A605785F&sid=B4F9D541F855CF96&eid=CDC418F38C4BFD60&journal_id=1000-8152&journal_name=控制理论与应用&referenced_num=0&reference_num=9