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金属学报(英文版) 2005
MICROSTRUCTURE AND PROPERTIES OF ANNEALED ZnO THIN FILMS DEPOSITED BY MAGNETRON SPUTTERINGKeywords: zinc oxide thin films,microstructure,magnetron sputtering,post-deposition annealing,electrical conductivity Abstract: 1.IntroductionZnO especially in the form ofthin film shasbeen attracting attention because ofits m any applica-tions,such astransparentelectrodes,varistors,phosphors,gassensors,surface acousticw ave devicesandpiezoelectric actuators1,2].M ore recently,re…
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