%0 Journal Article
%T MICROSTRUCTURE AND PROPERTIES OF ANNEALED ZnO THIN FILMS DEPOSITED BY MAGNETRON SPUTTERING
%A JLee
%A <br>J. Lee
%A M. Hodgson
%A A. Asadov
%A J. Metson
%J 金属学报(英文版)
%D 2005
%I 
%X 1.IntroductionZnO especially in the form ofthin film shasbeen attracting attention because ofits m any applica-tions,such astransparentelectrodes,varistors,phosphors,gassensors,surface acousticw ave devicesandpiezoelectric actuators1,2].M ore recently,re…
%K zinc oxide thin films
%K microstructure
%K magnetron sputtering
%K post-deposition annealing
%K electrical conductivity<br>氧化锌薄膜
%K 微结构
%K 磁溅射工艺
%K 被动沉积退火
%U http://www.alljournals.cn/get_abstract_url.aspx?pcid=5B3AB970F71A803DEACDC0559115BFCF0A068CD97DD29835&cid=AB188D3B70B071C57EB64E395D864ECE&jid=C19B08D052F5FD8445F4BB80A1A5D7BF&aid=DEE3B9EB27A6247845FDCC5FE660EF1E&yid=2DD7160C83D0ACED&vid=13553B2D12F347E8&iid=38B194292C032A66&sid=6425DAE0271BB751&eid=DD74772618543076&journal_id=1006-7191&journal_name=金属学报(英文版)&referenced_num=0&reference_num=8