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金属学报(英文版) 1999
THELATTICE STRAIN CAUSED BY ION IMPLANTATIONAbstract: １．ＩｎｔｒｏｄｕｃｔｉｏｎＴｈｅｘｒａｙｄｉｆｆｒａｃｔｉｏｎｍｅｔｈｏｄｓａｎｄｅｓｐｅｃｉａｌｌｙｔｈｅｍｅａｓｕｒｅｍｅｎｔｓｏｆｔｈｅＢｒａｇｇｒｅｆｌｅｃｔｉｏｎｒｏｃｋｉｎｇｃｕｒｖｅｓｗｅｒｅｗｉｄｅｌｙｕｓｅｄｉｎｔｈｅｓｔｕｄｙｏｆｉｏｎｉｍｐｌａｎｔｅｄｃｒｙｓｔａｌ〔１〕，ｓｕｐｅｒｌａｔｔｉｃｅ〔２〕ａｎｄｅｐｉｔａｘｉａｌｌａｙｅｒ〔３〕．Ｔｈｅｒｏｃｋｉｎｇｃｕｒｖｅｓｃａｎｐｒｏｖｉｄｅｉｎｆｏｒｍａｔｉｏｎｏｎｄｅｐｔｈｐｒｏｆｉｌｅｓｏｆｓｔｒａｉｎｆｏｒ…
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