%0 Journal Article %T THELATTICE STRAIN CAUSED BY ION IMPLANTATION %A DL Ma %A XL Mu %A
%J 金属学报(英文版) %D 1999 %I %X 1.IntroductionThexraydiffractionmethodsandespeciallythemeasurementsoftheBraggreflectionrockingcurveswerewidelyusedinthestudyofionimplantedcrystal〔1〕,superlattice〔2〕andepitaxiallayer〔3〕.Therockingcurvescanprovideinformationondepthprofilesofstrainfor… %U http://www.alljournals.cn/get_abstract_url.aspx?pcid=5B3AB970F71A803DEACDC0559115BFCF0A068CD97DD29835&cid=AB188D3B70B071C57EB64E395D864ECE&jid=C19B08D052F5FD8445F4BB80A1A5D7BF&aid=EC758DDB5FCFAEE5A6F6CB21477965E3&yid=B914830F5B1D1078&vid=59906B3B2830C2C5&iid=E158A972A605785F&sid=DDDA4F26E8AD3C0E&eid=A03A15CF5604A8B0&journal_id=1006-7191&journal_name=金属学报(英文版)&referenced_num=0&reference_num=13