LASER LIFT-OFF OF GaN THIN FILMS FROM SAPPHIRE SUBSTRATES

1. IntroductionRecently the development of GaN-based blue and blue-green light-emitting devices hasproceeded rapidlyl1] t which will enable the appllcation of b1ue light-emittil1g diodes (LED3)and laser diodes (LDs)l']. However, due to lack of the native substrates, films of GaN areusually grown on dissimilar substrates such as sapphire and SiCl3l4]. The most commonlyused growth substrate, sapphire, still restricts the quaJity of GaN film due to the latticeand thermaLexpansion coefficien…