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CONTAMINATION LINE METHOD AND COMPARISON OF FOIL THICKNESS MEASUREMENT METHODS IN TRANSMISSION ELECTRON MICROSCOPY

Keywords: transmission electron microscopy,foil thickness measurement

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Abstract:

The paper briefly introduces the Contamination Line Method for foil thickness measurement in transmission electron microscopy and compares it with four conventional methods: the convergent beam diffraction method, the contamination spot method, the methods hased on characteristic X-ray emission and continuous X-ray emission on the application, aperation and accuracy etc.

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