THE INTERACTION BETWEEN STACKING FAULT AND HYDROGEN IN SINGLE CRYSTAL SILICON
硅单晶中层错与氢的交互作用

Hydrogen on the surface of single crystal silicon has been introduced bycathodic charing. The interaction between stacking fault and hydrogen on the surface of thesample has been researched by means of chemical etching. Atomic hydrogen will segregate atoutcrops of the stacking fault and particularly Frank dislocation on the surface of single crystal silicon and compound into molecule hydrogen at the outcrops. The distortion zone induced by hydrogen pressure, which can be detected as etching pit after etching, is preferablylocated at the outcrops of Frank dislocation.