IN SITU MEASUREMENT OF ELECTRIC CONDUCTIVITY OF ULTRA THIN Al FILM
超薄铝膜电导特性的原位测量研究

The electric conductivity of sputtered ultrathin Al films as a function of thickness has been measured in situ during vacuum deposition process. At different stages of growth, the films have the different electric conductivity characteristics. Therotical analysis showed that surface scattering and grain boundary scattering played a main role in size effect of resistivity.